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Title: Electro-acoustic Characterization of Ferroelectric AlScN Resonators
Committee:
Dr. Ansari, Advisor
Dr. Khan, Chair
Dr. Ayazi
Abstract: The objective of the proposed research is to understand the physics behind the FBAR switching mechanism and to fabricate sub-6GHz tunable hybrid filters, utilizing the ferroelectric properties of AlScN-based thin film with high Scandium concentrations.