*********************************
There is now a CONTENT FREEZE for Mercury while we switch to a new platform. It began on Friday, March 10 at 6pm and will end on Wednesday, March 15 at noon. No new content can be created during this time, but all material in the system as of the beginning of the freeze will be migrated to the new platform, including users and groups. Functionally the new site is identical to the old one. webteam@gatech.edu
*********************************
Title: Advanced HARPSS Processes for High Q and High Frequency Inertial Sensors
Committee:
Dr. Farrokh Ayazi, ECE, Chair , Advisor
Dr. Oliver Brand, ECE
Dr. Azadeh Ansari, ECE
Dr. Hua Wang, ECE
Dr. Peter Hesketh, ME
Abstract:
This research involves the design and fabrication processes for developing high Q and high frequency MEMS inertial sensors, primarily thick epitaxially grown polysilicon BAW disk MEMS gyroscopes; wafer-level packaged MEMS resonators for timing applications; and high bandwidth resonant MEMS accelerometer prototypes using a combined piezo-HARPSS process, to meet the demand of the surging growth of IoT technology. These new fabrication techniques enable high performance of these sensors, by overcoming the current limitations, and can be used in emerging applications in healthcare, smart cars, 5G and other smart sensors.
