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Title: Capacitive chemical gas microsensor
Committee:
Dr. Brand, Advisor
Dr. Degertekin, Chair
Dr. Bakir
Dr. Taylor
Abstract:
The objective of the proposed research is to systematically investigate interdigitated capacitive sensors with amine-functionalized sensing films as CO2 sensors and improve their sensor performance (sensitivity, selectivity, and response time). In particular, the dependence of the sensor response on sensor temperature, sensing film type and thickness is of interest. The use of capacitive sensors with amino-functionalized sensing films can enable the mass production of CMOS-compatible solid-state CO2 sensing systems to achieve system miniaturization and low-cost production.
