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There is now a CONTENT FREEZE for Mercury while we switch to a new platform. It began on Friday, March 10 at 6pm and will end on Wednesday, March 15 at noon. No new content can be created during this time, but all material in the system as of the beginning of the freeze will be migrated to the new platform, including users and groups. Functionally the new site is identical to the old one. webteam@gatech.edu
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Title: 3D and 2.5D Microfabrication Technologies for High-density Electronic Heterogeneous Integration and Biosensing Applications
Committee:
Dr. Muhannad Bakir, ECE, Chair , Advisor
Dr. Oliver Brand, ECE
Dr. Hua Wang, ECE
Dr. Omer Inan, ECE
Dr. Samuel Sober, Biology Emory University
Abstract:
The demand for continuous increase in computing performance has put an overburdening demand on I/O interface and novel heterogeneous integration to allow performance benefits at system level. The demand for high-density integration is not limited to computing systems but, with ever increase use of electronics in biological science space, extends to in vitro and in vivo biosensing systems as well. In this research, 3D and 2.5D microfabrication technologies for advancing heterogeneous integration and biosensing systems are presented. Technology enablers for realizing large-scale silicon systems as well as unique fabrication allowing 3D solenoidal micro-inductors alongside flexible interconnects are discussed in the first half of the dissertation. The fabrication technology utilizes photoresist reflow process to obtain dome-shaped structures to serve as the basis for the flexible interconnects, self-alignment structures and 3D solenoidal micro-inductors. The same fabrication technology is then adapted and applied to in vitro and in vivo biosensing domain; through-silicon-vias and flexible interconnects are used to fabricate an electronic microplate platform for low-cost high-throughput biosensing. Furthermore, the reflow process is further utilized to fabricate 3D multi-electrode arrays on flexible substrate for high SNR EMG recordings from songbird.
