Plasma Etching Probe Device

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Plasma Etching Probe Device

Georgia Tech graduate research assistant Mason Chilmonczyk examines a device after a plasma etch step in a reactive ion etching tool. The work was being done in the Institute of Electronics and Nanotechnology’s Marcus Building clean room. (Credit: Rob Felt, Georgia Tech)

Additional Information

Groups

Research Horizons

Categories
Research, Chemistry and Chemical Engineering, Life Sciences and Biology
Keywords
plasma etch, Dynamic Mass Spectrometry Probe
Status
  • Created By: John Toon
  • Workflow Status: Draft
  • Created On: Oct 10, 2018 - 4:33pm
  • Last Updated: Oct 10, 2018 - 4:33pm