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Title: Thermal Modulation of Microfabricated Cantilever-based Chemical Sensors for Improved Selectivity
Committee:
Dr. Brand, Advisor
Dr. Degertekin, Chair
Dr. Sarioglu
Abstract:
The objective of the proposed research is to develop a microfabricated heated cantilever chemical sensor that is able to discriminate between gas phase volatile organic compounds with their respective concentrations in air without need for an array of cantilevers or a reference gas/valve system. This will be achieved via temperature modulation schemes applied to the cantilever through integrated heating resistors with appropriate data processing techniques and analytical models of the cantilever and analyte-sorption film interactions. The research will characterize the response of the system to an analyte by extracted thermodynamic and absorption coefficients, which will lead to improved selectivity. Additionally, the proposed research will investigate techniques to remove environmental effects on the cantilever and improve long term stability and reliability of the device.
