IEN Special Technical Presentation: Elionix Electron Beam Lithography Systems

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Event Details
  • Date/Time:
    • Tuesday August 9, 2016 - Wednesday August 10, 2016
      2:00 pm - 3:59 pm
  • Location: Marcus Nanotechnology Building Room 1117-1118 | 345 Ferst Drive | Atlanta GA 30332
  • Phone: (404) 894-5100
  • URL: http://ien.gatech.edu
  • Email: info@ien.gatech.edu
  • Fee(s):
    N/A
  • Extras:
Contact

devin.brown@ien.gatech.edu

Summaries

Summary Sentence: We cordially invite those interested in electron beam lithography to join us on Tuesday August 9th, from 2:00 to 4:00pm in the Marcus Nanotechnology Building, Room 1117-1118, for a presentation by Elionix on their line of Electron Beam Lithography (EBL)s.

Full Summary: No summary paragraph submitted.

We cordially invite those interested in electron beam lithography to join us on Tuesday August 9th, from 2:00 to 4:00pm in the Marcus Nanotechnology Building, Room 1117-1118, for a presentation by Elionix on their line of Electron Beam Lithography (EBL) systems. Representatives from Elionix will highlight the specifications, the features, and give examples of the performance of their EBL systems.

Since 1975, Elionix has been manufacturing, installing, and servicing Electron Beam Lithography systems. During that time, Elionix has sold over 400 EBL systems to research institutes and industrial customers. The Elionix electron beam lithography tools are known for ultra-high precision to fabricate small nano-structures, excellent reliability, small footprint, and a low cost of ownership.

Additional Information

In Campus Calendar
Yes
Groups

NanoTECH, Institute for Electronics and Nanotechnology, Georgia Electronic Design Center (GEDC), The Center for MEMS and Microsystems Technologies, 3D Systems Packaging Research Center

Invited Audience
Undergraduate students, Faculty/Staff, Public, Graduate students
Categories
Career/Professional development, Seminar/Lecture/Colloquium
Keywords
lithography, microscopy demonstrations, nanolithography, the Institute for Electronics and Nanotechnology, The School of Materials Science and Engineering
Status
  • Created By: Christa Ernst
  • Workflow Status: Published
  • Created On: Aug 3, 2016 - 9:55am
  • Last Updated: Apr 13, 2017 - 5:15pm