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Title: Frequency Control of High-Q MEMS Resonators and Resonant Gyroscopes via Stiffness Trimming
Committee:
Dr. Ayazi, Advisor
Dr. Bhatti, Chair
Dr. Brand
Abstract: The objective of this proposal is to investigate and develop novel frequency control techniques based on stiffness trimming for high quality factor MEMS resonant sensors. In a first effort, energy confinement via out-of-plane curvature discontinuities have been investigated to isolate the vibrating structure from its lossy anchor. In a second and more general effort, which is at the heart of this research, pulsed laser stiffness trimming (PLST) of Germanium-loaded Single Crystal Silicon resonators has been explored. The main result is that PLST can shift frequencies with record-high resolution while imparting only a negligible impact on high Q resonators.
