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Title: High-frequency Thin-film Piezoelectric-on-Silicon Resonant Gyroscopes
Committee:
Dr. Ayazi, Advisor
Dr. Brand, Chair
Dr. Degertekin
Abstract: The objective of this research is to investigate the viability of implementing piezoelectrically transduced mode-matched high-frequency resonant gyroscopes. Piezoelectric transduction of high-frequency resonant gyroscopes is explored to enable efficient in-air operation and hence minimize packaging complexity of multi-degree-of-freedom sensors. In-plane flexural gyroscopic modes compatible with thin-film piezoelectric transduction are identified and their functionality is demonstrated. Two methods of intermodal displacement feedback and eigenmode operation are proposed to attain modal alignment of the all-piezoelectric gyroscopes towards implementation of real-time mode-matching schemes.
