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There is now a CONTENT FREEZE for Mercury while we switch to a new platform. It began on Friday, March 10 at 6pm and will end on Wednesday, March 15 at noon. No new content can be created during this time, but all material in the system as of the beginning of the freeze will be migrated to the new platform, including users and groups. Functionally the new site is identical to the old one. webteam@gatech.edu
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An example of 3D MEMS devices are the micro-HSRs developed over the past two years by the IMEMS Lab through a DARPA-funded project in collaboration with Northrop Grumman. These resonators consist of millimeter diameter silicon dioxide micro-wineglass shells surrounded by electrodes for electrostatic actuation of the mechanical resonance modes of the shells.