micro-HSRs

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micro-HSRs

An example of 3D MEMS devices are the micro-HSRs developed over the past two years by the IMEMS Lab through a DARPA-funded project in collaboration with Northrop Grumman. These resonators consist of millimeter diameter silicon dioxide micro-wineglass shells surrounded by electrodes for electrostatic actuation of the mechanical resonance modes of the shells.

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School of Electrical and Computer Engineering

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  • Created By: Jackie Nemeth
  • Workflow Status: Published
  • Created On: Dec 3, 2015 - 4:57pm
  • Last Updated: Oct 7, 2016 - 10:47pm